Central aim of organisation
Development and commercialization of nanofabrication tools based on electron and ion multi-beams, respectively.
Briefly describe your organisation
IMS Nanofabrication AG is a Vienna, Austria, based nanotec company focused on Projection Mask-Less Lithography (PML2) with electron multi-beams and Charged Particle Nanotech (CHARPAN) with ion multi-beams.
Research & Development
| - Design & Methods for Nanoelectronics |
- Equipment & Materials for Nanoelectronics
| - MEMS Technologies |