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Vienna University of Technology
Institute of Sensor and Actuator Systems / Microsystems Technology

 Contact data
StreetFloragasse 7 
ZIP, City, Region 1040 - Vienna (Vienna) 
Phone++43-1-58801-36689 
Fax++43-1-58801-36698 
EmailSend Email
Webwww.isas.tuwien.ac.at 
 Contact person

Prof. Dr. Ulrich Schmid (Head of Institute)
 Employees (Total)
Total: 250+  number of researches: 3300
 Competencies

 Central aim of organisation
The main focus is on the design, fabrication and evaluation of micromachined devices (e.g. sensors and actuators) incl. packaging issues.

 Briefly describe your organisation
The Microsystems Technologies group is headed by Prof. Dr. U. Schmid since the 1st of October 2008. Before, Prof. Schmid was several years with research departments of DaimlerChrysler AG and European Aeronautic and Space Company. Due to his research activities, there is a strong expertise in technologies and in the application of both conventional (i.e. Si, glass) and non-conventional (i.e. sapphire, LTCC, flex substrates, silicon carbide, alloys) materials for the fabrication of robust micromachined devices. Access to cleanroom facilities (i.e. ISAS, ZMNS) is given. Also the access to equipment for analysing surfaces and thin films (e.g. SEM, XRD, AFM) can be provided. For the design of devices and packages, conventional FEM-based tools are used.

 Core Competency

Research & Development

 ICT sectors:
- Systems- and Network Technology     
   - Internet Technologies     
- Cognitive Systems, Interaction and Robotics     
   - Sensor Technology     
- Micro- and Nanoelectronics, Embedded Systems     
   - Systems-on-Chip, Systems-on-Package     
   - Embedded Systems and Real-time Systems     
   - Equipment & Materials for Nanoelectronics     
   - MEMS Technologies     
   - Semiconductors     
   - Reliability     
- Radio Frequency Technologies     
   - Radar Technologies     
 RTD Experiences & Publications

 My organisation has been involved in projects funded by the following EU-programmes
  Coordinator  Partner 
EU Framework Programme (FP)
Other international co-operative research

 Austrian Research and Development Projects
  Coordinator  Partner 
Non-cooperative Projects (Single projects)        
Cooperative Projects

 RTD Experience
The research focus of Prof. Schmid is in the design and the corresponding technologies for the realization of robust micromachined devices. This comprises the fabrication and evaluation of micoelectronic devices for high temperature applications made of 6H-SiC. Furthermore, a strong expertise is on thin film metallization systems based on AlSiCu, Ti/Pt, Mo, Ta, W, WTi and the impact of high temperatures on the morphology and the electrical performance. For passivation purposes, a-SiC:H, Al2O3, TaN or AlN thin films were investigated. In the field of MEMS, pressure sensors for application scenarios up to 700°C using sapphire and nickel based superalloys to form the membrane were applied. For application scenarios providing pressures ranging up to 1350 bar a thermo-resistive flow sensor based on low temperature co-fired ceramics (LTCC) was developed. Besides the device, problems in the field of system integration using electro discharge machining as well as electron beam welding techniques were successfully solved. For radar applications LTCC served as highly integrated substrate. For this purpose, a technique was developed to make the glass- ceramic locally porous to tailor dielectric properties. Furthermore, the long-term performance of thick film and thin film metallization layers are under investigation (e.g. Ag, Au). On device level, a RF-MEMS switch was developed on basis of TiW so that a hermetic package can be applied. In a different project, sputter deposited AlN thin films are synthesized and characterised for the use as microactuators for e.g. the excitation of microstructures. Currently, test structures are evaluated giving the possibility for a mode selective excitation.

 Publications
Peer-reviewed contributions to journals (2014 and partly 2015):

Viscous and Acoustic Losses in Length-Extensional Microplate Resonators in Liquid Media
V. Ruiz-Díez, J. Hernando-García, T. Manzaneque, M. Kucera, U. Schmid, J.L. Sánchez-Rojas, Applied Physics Letters, Vol. 106, pp. 083510, 2015.

Impact of Auxiliary Capacitively Coupled Plasma on the Properties of ICP-CVD Deposited a-SiNx:H Thin Films
D. Dergez, J. Schalko, S. Löffler, A. Bittner und U. Schmid, Sensors & Actuators A, Vol. 224, pp. 156-162, 2015.

Impact of Film Thickness on the Temperature-activated Leakage Current Behavior of Sputtered Aluminium Nitride Thin Films
M. Schneider, A. Bittner und U. Schmid, Sensors & Actuators A, Vol. 224, pp. 177-184, 2015.

Impact of Annealing Temperature on the Mechanical and Electrical Properties of Sputtered Aluminium Nitride Thin Films
M. Gillinger, M. Schneider, A. Bittner, P. Nicolay und U. Schmid, Journal of Applied Physics, Vol. 117, pp.065303, 2015.

Circular Test Structure for the Determination of Piezoelectric Constants of ScxAl1-xN Thin Films Applying Laser Doppler Vibrometry and FEM Simulations
P. M. Mayrhofer, H. Euchner, A. Bittner und U. Schmid, Sensors & Actuators A, Vol. 222, pp. 301-308, 2015.

Thickness Dependence of Young’s Modulus and Residual Stress of Sputtered Aluminium Nitride Thin Films
M. Schneider, A. Bittner und U. Schmid, Applied Physics Letters, Vol. 105, pp. 201912, 2014.

Piezoelectric MEMS Resonator-based Oscillator for Density and Viscosity Sensing
T. Manzaneque, V. Ruiz-Díez, J. Hernando-García, E. Wistrela, M. Kucera, U. Schmid and J.L. Sánchez-Rojas, Sensors & Actuators A, Vol. 220, pp. 305-315, 2014.

High Performance AlScN Thin Film Based Surface Acoustic Wave Devices with Large Electromechanical Coupling Coefficient
W. Wang, P.M. Mayrhofer, X. He, M. Gillinger, Z. Ye, X. Wang, A. Bittner, U. Schmid and J.K. Luo, Applied Physics Letters, Vol. 105, pp. 133502, 2014.

Prototype of a Large-Scale Autostereoscopic Laser Display for Outdoor Applications
J. Reitterer, F. Fidler, F. Saint Julien-Wallsee, G. Schmid, W. Leeb und U. Schmid, Optics Express, Vol. 22, Iss. 22, pp. 27063-27068, 2014.

A Two-step Load-deflection Procedure Applicable to Extract the Young’s Modulus and the Residual Tensile Stress of Circularly-shaped Thin-film Diaphragms
R. Beigelbeck, M. Schneider, J. Schalko, A. Bittner und U. Schmid, Journal of Applied Physics, Vol. 116, pp. 114905, 2014.

Arrays of Open, Independently Tunable Microcavities
C. Derntl, M. Schneider, J. Schalko, A. Bittner, J. Schmiedmayer, U. Schmid und M. Trupke, Optics Express, Vol. 22, Iss. 18, pp. 22111-22120, 2014.

The Impact of Argon Admixture on the c-Axis Oriented Growth of DC Magnetron Sputtered ScxAl1-xN Thin Films
P. M. Mayrhofer, C. Eisenmenger-Sittner, M. Stöger-Pollach, H. Euchner, A. Bittner und U. Schmid, Journal of Applied Physics, Vol. 115, pp. 193505, 2014.

Characterisation of a Roof Tile-shaped Out-of-Plane Vibrational Mode in Aluminium Nitride Actuated Self-sensing Micro Resonators for Liquid Monitoring Purposes
M. Kucera, E. Wistrela, G. Pfusterschmied, V. Ruiz-Díez, T. Manzaneque, J. L. Sánchez-Rojas, J. Schalko, A. Bittner und U. Schmid, Applied Physics Letters, Vol. 104, pp. 233501, 2014.

Layer-by-Layer Approach for Deposition of Pure Carbon Nanotubes and Composite Films for Use as Electrodes in Electrochemical Devices
T. Bohnenberger und U. Schmid, Thin Solid Films, Vol. 565, pp. 116-121, 2014.

Design Dependant Performance of Self-actuated and Self-sensing Piezoelectric-AlN Cantilevers in Liquid Media Oscillating in the Fundamental in-plane Bending Mode
M. Kucera, E. Wistrela, G. Pfusterschmied, V. Ruiz-Díez, T. Manzaneque, J. Hernando-Garcia, J.L. Sánchez-Rojas, A. Jachimowicz, J. Schalko, A. Bittner und U. Schmid, Sensors & Actuators B, Vol. 200, pp. 235-244, 2014.

Graphical Based Characterization and Modelling of Material Gradients in Porosified LTCC
F. Steinhäußer, A. Talai, A. Steiger-Thirsfeld, A. Koelpin, R. Weigel, A. Bittner und U. Schmid, Journal of the European Ceramic Society, Vol. 34, Iss. 11, pp. 2833-2838, 2014.

Thin Films from Functionalized Carbon Nanotubes Using the Layer-by-Layer Technique
T. Bohnenberger, L. Rafailovic, Ch. Weilach, D. Hubmayr und U. Schmid, Thin Solid Films, Vol. 551, pp. 68-73, 2014.

Energy Storage Options for Wireless Sensors Powered by Aircraft Specific Thermoelectric Energy Harvester
K. Thangaraj, A. Elefsiniots, Th. Becker, U. Schmid, J. Lees, C.A. Featherston und R. Pullin, Microsystem Technologies, Vol. 20, pp. 701-707, 2014.

Unimorph and Bimorph Piezoelectric Energy Harvester Stimulated by β-Emitting Radioisotopes: A Modeling Study
Ali B. Alamin Dow, U. Schmid und Nazir P. Kherani, Microsystem Technologies, Vol. 20, pp. 933-944, 2014.

Temperature Dependant Dielectric Breakdown of Sputter-Deposited AlN Thin Films Using a Time-zero Approach
M. Schneider, A. Bittner und U. Schmid, Microsystem Technologies, Vol. 20, pp. 751-757, 2014.

Electrical Characterization of Micromachined AlN Resonators at Various Back Pressures
A. Ababneh, A.N. Al-Omari, A. Dagamseh, H.C. Qiu, D. Feili, V. Ruiz-Díez, T. Manzaneque, J. Hernando, J. L. Sánchez-Rojas, A. Bittner, U. Schmid und H. Seidel, Microsystem Technologies, Vol. 20, pp. 663-670, 2014.

Lock-in Amplifier Powered Analogue Q-control Circuit for Self-actuated Self-sensing Piezoelectric MEMS Resonators
M. Kucera, F. Hofbauer, E. Wistrela, T. Manzaneque, V. Ruiz-Díez, J.L. Sánchez-Rojas, A. Bittner und U. Schmid, Microsystem Technologies, Vol. 20, pp. 615-625, 2014.

Piezoelectric In-Plane Microplate Resonators Based On Contour and Flexure-Actuated Modes
T. Manzaneque, V. Ruiz-Díez, J. Hernando-García, A. Ababneh, M. Kucera, A. Bittner, U. Schmid, H. Seidel und J.L. Sánchez-Rojas, Microsystem Technologies, Vol. 20, pp. 691-699, 2014.

Design, Fabrication and Testing of a Piezoelectric Energy Microgenerator
Ali B. Alamin Dow, A. Bittner, U. Schmid und Nazir P. Kherani, Microsystem Technologies, Vol. 20, pp. 1035-1040, 2014.

Impact of Doping Level on the Metal Assisted Chemical Etching of p-type Silicon
A. Backes und U. Schmid, Sensors & Actuators B, Vol. 193, pp. 883-887, 2014.

A Thermoelectric-Based Energy Harvesting Module with Extended Operational Temperature Range for Powering Autonomous Wireless Sensor Nodes in Aircraft
A. Elefsiniotis, N. Kokorakis, Th. Becker und U. Schmid, Sensors & Actuators A, Vol. 206, pp. 159-164, 2014.

Thermoelectric Energy Harvesting Using Phase Change Materials (PCMs) in High Temperature Environments in Aircraft
A. Elefsiniotis, Th. Becker und U. Schmid, Journal of Electronic Materials, Vol. 43, Iss. 6, pp. 1809-1814, 2014.

High Temperature Measurement Set-up for the Electro-Mechanical Characterization of Robust Thin Film Systems
S. Fricke, A. Friedberger, H. Seidel und U. Schmid, Measurement Science and Technology, Vol. 25, p. 015007 (6pp), 2014.

 Inserted / Updated
2008-10-22 / 2015-04-08